IWC 20-59: Semiconductor Manufacturing Process Improvements and the Role of Real Time Copper Wastewater Analysis
Author/s: Vladimir Dozortsev, Aqua Metrology Systems, Sunnyvale, CA ; Luke Wilson, Samsung Austin Semiconductor, Austin, TX; Mike Knapp, Samsung Austin Semiconductor, Austin, TX
Discusser: Christopher Leitz, Leitz Environmental Consultants, Fort Meyers, FL